Brooks Instrument 4800 Series - Manual (Page 6)

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Brooks ® 4800 Series
Contents Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B0072AG
September, 2013
Figures
Figure Page
Number Number
1-1 Dimensions for Model 4850/4860 with Standard Process Connections ..................................... 1-4
1-2 Dimensions for Model 4850/4860 with Downport Connections .................................................. 1-4
1-3 Dimensions for the 4800 Series Local Operator Interface (LOI) ................................................ 1-6
3-1 Gas Flow Across the MEMS Sensor .......................................................................................... 3-1
4-1 Bench Troubleshooting Circuit ................................................................................................... 4-5
Tables
Table Page
Number Number
1-1 15-Pin D-Sub Connector Pin-out ................................................................................................ 1-3
4-1 Troubleshooting .......................................................................................................................... 4-2