Super Systems 9205 Series - Manual (Page 175)

Series 9205 Operations Manual Rev A 174
Before adjusting the recipe, the operator must first understand what needs to be modified. For example, if
the atmosphere level needs to be adjusted at the beginning of the recipe, double click on the line for SETPT.
The SETPT Edit Step box will appear.
Under the Atmosphere Setpoint text in the upper middle portion of the Edit Step box, there is a numeric
entry box. To modify this setpoint, either the Up or Down arrows can be pressed, or the desired atmosphere