Bird Technologies MSCC7 Series-Manual - Manual (Page 15)

1
Chapter 1 Introduction
The Bird Cal Cart is designed for immediate, effortless use. It has three pri-
mary components. The Bird 4421 RF Power Meter displays radio frequency
(RF) power. Bird 4020, 4027A, and 4027F Series Power Sensors are highly
accurate sensors that measure RF power without requiring calibration or
external couplers or attenuators. Bird Loads are low reflection 50 Ω termina-
tions that can dissipate 1 kW to 10 kW max., depending on the model. These
components are installed on a cart for easy transportation, and connected so
that the only setup required is connecting AC and RF power. The cart is suit-
able for use in a cleanroom environment, and is equipped with four swivel
casters for maximum maneuverability.
Items Supplied
Stainless Steel Cart with the following items installed:
z Bird 4421 RF Power Meter
z Two (2) Bird 4020, 4027A, or 4027F Series Sensors
z Bird Load with Shipping and Vent Plugs
z Cabling
z Instruction Manual
RF Power Meter
The Bird 4421 RF Power Meter measures forward and reflected RF power
when used in conjunction with a Bird power sensor. Measurements can be
made in units of either Watts or dBm. Because of the precision of the attached
load, reflected power will be negligible and can usually be ignored.
Note: The 4421 is equipped with rechargeable batteries. These are
shipped uncharged. Connect the unit to AC power the first time you use
it to charge the batteries.
Power Sensor
Sensors are available with a variety of connectors. Since the accuracy is criti-
cally dependent on the connectors used at calibration, do not remove or
change the connectors. Sensors are controlled by the Bird 4421 Power Meter.
4020 Series
Bird 4020 Series Power Sensors are designed for lab or field use and are accu-
rate to within ±3% of reading.
4027A Series
Bird 4027A Series Power Sensors are designed for use in semiconductor pro-
cessing and calibration applications. Stringent calibration provides long-term
unit-to-unit repeatability, allowing consistent amounts of RF energy to be
applied to the etch process over many etch cycles. 4027A Sensors are accurate
to ±1% at specified calibration frequencies and power levels.
CAUTION
Changing the sensor’s connectors will invalidate calibration data, and may
reduce the maximum power rating of the unit.