INFICON TM-400 Thin Film Deposition Monitor User Manual
INFICON Equipment
This manual is related to the following products:
Table of contents
Document Outline
- Cover Page
- Title Pager
- Trademarks
- Disclaimer
- Disclosure
- Copyright
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Safety Precaution and Preparation for Use
- Chapter 2 General Description
- 2.1 Introduction
- 2.2 Features
- 2.2.1 Independent Film Density and Tooling Factor Parameters
- 2.2.2 Acoustic Impedance Correction
- 2.2.3 Parameter Display
- 2.2.4 High Resolution Autoranged Display
- 2.2.5 Long-Term Parameter Storage
- 2.2.6 Multiple Computer Interfaces
- 2.2.7 Compact Case
- 2.2.8 DAC Output
- 2.2.9 Multiple Crystal Frequencies
- 2.2.10 Built In Test
- 2.2.11 Dynamic Measurement Update Rate
- 2.2.12 Automatic Crystal Switching (TM-400 Only)
- 2.3 Specifications
- 2.4 Accessories
- Chapter 3 Unpacking and Inspection
- Chapter 4 Monitor Installation
- Chapter 5 Sensor, Feedthrough and Oscillator
- Chapter 6 Sensor Crystal Replacement
- Chapter 7 Operation
- Chapter 8 Theory of Operation
- Chapter 9 Establishing The Deposition Parameters
- Chapter 10 Computer Interface
- Chapter 11 Repair and Maintenance