INFICON TM-400 Thin Film Deposition Monitor - Manual (Page 4)

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Microdot® is a registered trademark of Microdot Corp.
ConFlat® is a registered trademark of Varian Corporation.
INFICON® is a trademark of INFICON.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Disclosure
The disclosure of this information is to assist owners of INFICON equipment to properly operate and maintain
their equipment, and does not constitute the release of rights thereof. Reproduction of this information and
equipment described herein is prohibited without prior written consent from INFICON, Two Technology Place,
East Syracuse, NY 13057-9714. Phone 315.434.1100. See
www.inficon.com.
Copyright
©1998 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
WARNING
All standard safety procedures associated with the safe
handling of electrical equipment must be observed. Always
disconnect power when working inside the controller. Only
properly trained personnel should attempt to service the
instrument.