3 dac, 4 disable negative thickness/rate readings, 6 pulse switch at thickness endpoint – INFICON TM-400 Thin Film Deposition Monitor User Manual
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TM-350/400 Operating Manual
4.3.3 DAC
The TM-350/400 has two DAC output channels. One output is for rate and one is
for thickness. Each DAC channel has a selectable range, which is used to convert
the appropriate display to a 0 to 5-volt analog signal (for more information, see
).
4.3.4 Disable Negative Thickness/Rate Readings
While S16 switch 3 is on, the TM-350/400 will ignore all negative rate or thickness
readings and display these values as 0. Once the monitor measures a positive
change, it will begin displaying the current values in real time. Turning S16 switch
3 off disables this feature.
4.3.5 Allow Crystal Switching to a Failed Sensor (TM-400 Only)
By default, while in the deposit state, the TM-400 will check the state of the backup
sensor before an automatic crystal switch. If the backup sensor failed, the monitor
will keep the primary sensor active, and display an O-Fail error. With S16 switch 4
in the on position, the TM-400 can switch to a failed backup sensor, and still display
an O-Fail error. This can be helpful if the process requires an output to be active on
crystal failure.
4.3.6 Pulse Switch At Thickness Endpoint
While S16 Switch 7 is set on, the source shutter pulses closed (on) for 1 second
once the thickness endpoint is reached. As opposed to the standard operation
where the source shutter relay turns on after pressing Start and remains on until
the endpoint thickness is reached.
26 ON
OFF
OFF
ON
ON
27
OFF ON OFF ON ON
28
ON ON OFF ON ON
29 OFF
OFF
ON
ON
ON
30
ON OFF ON ON ON
31
OFF ON ON ON ON
32
ON ON ON ON ON
Table 4-2 Reconfiguring Monitor for Other Interface Address (continued)
Interface Address
S/SEL 4
S/SEL 5
S/SEL 6
S/SEL 7
S/SEL 8