INFICON TM-400 Thin Film Deposition Monitor User Manual

INFICON Equipment

O P E R A T I O N A N D S E R V I C E M A N U A L

TM-350/400

Thickness Monitor

178800 Rev. B

This manual is related to the following products:

TM-350 Thin Film Deposition Monitor

Table of contents

Document Outline

Cover Page
Title Pager
Trademarks
Disclaimer
Disclosure
Copyright
Declaration Of Conformity
Warranty
Table Of Contents
Chapter 1 Safety Precaution and Preparation for Use
- 1.1 Input Power Requirements
- 1.2 Power Entry Module
- 1.3 Power Cord
- 1.4 Grounding
- 1.5 Line Fuses
- 1.6 Power Switch
Chapter 2 General Description
- 2.1 Introduction
- 2.2 Features
- 2.3 Specifications
- 2.4 Accessories
Chapter 3 Unpacking and Inspection
- 3.1 Introduction
- 3.2 Bench Check-Out
- 3.3 Installing Options
  - 3.3.1 IEEE-488 Option Board
  - 3.3.2 RS-485 Option
- 3.4 Digital To Analog Converter (DAC) Checkout
Chapter 4 Monitor Installation
- 4.1 Monitor Installation Precautions
  - 4.1.1 Proper Grounding
  - 4.1.2 Heat Dissipation
- 4.2 Rear Panel Connections
- 4.3 Internal DIP Switches
- 4.4 Monitor Cover Removal
Chapter 5 Sensor, Feedthrough and Oscillator
- 5.1 Sensor Head Description
- 5.2 Sensor Head Installation
- 5.3 Instrumentation Feedthrough Installation
- 5.4 Sensor Oscillator Installation
Chapter 6 Sensor Crystal Replacement
- 6.1 Introduction
Chapter 7 Operation
- 7.1 Front Panel Displays
- 7.2 Front Panel Controls
- 7.3 Display and Modification Of Parameters
- 7.4 Thickness Set Point Shutter Control
- 7.5 Crystal Test Display
- 7.6 Crystal Fail Indication
- 7.7 Power Fail Indication
- 7.8 DAC Operation
Chapter 8 Theory of Operation
- 8.1 Basic Measurement
- 8.2 Film Thickness Calculation
- 8.3 Crystal Health Calculation
- 8.4 Rate Calculation
Chapter 9 Establishing The Deposition Parameters
- 9.1 Introduction
- 9.2 Tooling Factor
- 9.3 Sensor Number (TM-400 Only)
- 9.4 Density
- 9.5 Acoustic Impedance
- 9.6 Empirical Calibration
Chapter 10 Computer Interface
- 10.1 General
- 10.2 RS-232 Serial Interface
- 10.3 RS-485 Serial Interface
- 10.4 IEEE-488 Parallel Interface
- 10.5 Protocol
- 10.6 Data Types
- 10.7 Message Received Status
- 10.8 Instruction Summary
- 10.9 Instruction Descriptions
Chapter 11 Repair and Maintenance
- 11.1 Handling Precautions
- 11.2 Maintenance Philosophy
- 11.3 Self Test Failure Detection
- 11.4 Troubleshooting Aids To Isolate Installation Faults
- 11.5 How To Contact Customer Support
- 11.6 Returning Your Instrument to INFICON