INFICON RS-3000 Power Supply Controller User Manual
Page 4
instruments
Power Supply Controller
RS-3000
Table of Contents
S
ECTION
1 ................................................................................................................................... 1-1
D
ESCRIPTION OF
E
QUIPMENT
............................................................................................................ 1-1
S
ECTION
2 ................................................................................................................................... 2-1
C
ONNECTIONS
.................................................................................................................................. 2-1
F
RONT
P
ANEL
I
NTERFACE
................................................................................................................ 2-1
S
ECTION
3 ................................................................................................................................... 3-1
S
PECIFICS
........................................................................................................................................ 3-1
3.1
Program mode..............................................................................................................3-1
3.2
Manual mode................................................................................................................3-1
3.3
Ramp mode..................................................................................................................3-2
3.4
Remote mode...............................................................................................................3-2
3.5
Error/problem Conditions .............................................................................................3-3
3.6
Hardware Specifics ......................................................................................................3-3
S
ECTION
4 ................................................................................................................................... 4-1
S
PECIFICS
........................................................................................................................................ 4-1
4.1
Events and modes........................................................................................................4-1
S
ECTION
5 ................................................................................................................................... 5-1
S
ERVICE
........................................................................................................................................... 5-1
Preface
Page iii
Table of Contents