INFICON RS-3000 Power Supply Controller - Manual (Page 17)

RS-3000 Power Supply Controller
instruments
Table 3-3 Back-panel 15-pin D-sub Female Pin Descriptions
PIN
NUMBER DESCRIPTION of Connector Labeled External Control I/O
Direction
1 Analog ground of the RS-3000 presented to remote controller
(used with Voltage control [pin #9]) ground
pass thru
2 Along with pin 10, this line presents the RS-3000 digital ground to
the remote controller ground
pass thru
3 Interlock status indication: grounded (to pin 2) or digital low =
satisfied, open or digital high = interlock error (indicated by front
panel LED) Input
w/ pull-up
4 Process abort (digital low = process abort) Input
w/ pull-up
5 Process START event (digital falling edge = START event) Input
w/ pull-up
6 Fault reset (digital falling edge = reset event) Input
w/ pull-up
7 Remote out (digital high = remote enabled) Output
w/ pull-up
8 Ready (digital high = ready enabled) Output
w/ pull-up
9 Voltage control (remote voltage control, via RS-3000, of the
T3000) Input
10 Along with pin 2, this line presents the RS-3000 digital ground to
the remote controller ground
pass thru
11 Process timer reset (digital falling edge = reset event) Input
w/ pull-up
12 Process STOP event (digital falling edge = STOP event) Input
w/ pull-up
13 Remote/Local START mode Input
w/ pull-up
14 Busy (digital high = active) Output
w/ pull-up
15 Fault (digital high = active) Output
w/ pull-up
Specifics Page 3 - 6 Section 3