Bronkhorst EX-FLOW Mass Flow User Manual
Page 5
BRONKHORST HIGH-TECH B.V.
TABLE OF CONTENTS
1
Intrinsic safe sensors
1.1
General description .................................................................................................................. page 7
1.2
Principle of operation of flow sensor ........................................................................................ page 7
1.3
Sensor and laminar flow device of flow sensor ....................................................................... page 7
1.4
Bronkhorst High-Tech B.V. flowhead ....................................................................................... page 8
1.5
Gas conversion factors ............................................................................................................ page 9
1.5.1 Software for conversion factor calculation ............................................................................... page 10
1.6
Control valve ............................................................................................................................ page 11
1.6.1 Introduction .............................................................................................................................. page 11
1.6.2 Kv-value calculation ................................................................................................................. page 12
1.6.3 Maximum pressure drop .......................................................................................................... page 12
1.7
Ex-proof Coils .......................................................................................................................... page 13
1.7.1 Introduction .............................................................................................................................. page 13
1.7.2 Style XB-coil ............................................................................................................................. page 13
1.7.3 Style XC-coil ............................................................................................................................ page 13
2
Installation
2.1
Receipt of equipment ............................................................................................................... page 14
2.2
Return shipment ....................................................................................................................... page 14
2.3
Service ..................................................................................................................................... page 14
2.4
Mounting .................................................................................................................................. page 15
2.5
In-line filter ............................................................................................................................... page 15
2.6
Gas connections ...................................................................................................................... page 15
2.7
Piping ....................................................................................................................................... page 16
2.8
Electrical connections .............................................................................................................. page 16
2.9
Caution ..................................................................................................................................... page 16
2.10 Supply pressure ....................................................................................................................... page 17
2.11 System purging ........................................................................................................................ page 17
2.12 Seals ........................................................................................................................................ page 17
2.13 Equipment storage ................................................................................................................... page 17
3
Operation
3.1
General .................................................................................................................................... page 18
3.2
Power and warm-up ................................................................................................................. page 18
3.3
Start-up .................................................................................................................................... page 18
3.4
Operating conditions ................................................................................................................ page 18