Bronkhorst EX-FLOW Mass Flow - Manual (Page 17)

BRONKHORST HIGH-TECH B.V.
2.10 Supply pressure
Do not apply pressure until electrical connections are made. When applying pressure to the system, take
care to avoid pressure shocks in the system and increase pressure gradually, especially on high pressure
units incorporating a membrane/piston operated control valve.
2.11 System purging
If explosive gases are going to be used, purge the process with inert dry gas like Nitrogen, Argon etc. for at
least 30 minutes.
In systems with corrosive gases like silane, purging with an inert gas is absolutely necessary, because if the
tubing has been exposed to air, introducing these gases will tend to clog up or corrode the system due to a
chemical reaction with air or moist air.
Complete purging is also required to remove such gases from the system before exposing the system to air.
It is preferred not to expose the system to air, when working with these corrosive gases.
2.12 Seals
Bronkhorst High-Tech B.V. has gathered a material compatibility chart from a number of sources believed to
be reliable.
However, it is a general guide only. Operating conditions may substantially change the accuracy of this
guide. Therefore is no liability for damages accruing from the use of this guide.
The customers application demands its own specific design or test evaluation for optimum reliability.
So check if the seals like O-rings, plunger and packing glands of capillary are correct for your process.
2.13 Equipment storage
The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be
taken not to subject the equipment to excessive temperatures or humidity.
9.17.028 page 17