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Bronkhorst EX-FLOW Mass Flow User Manual

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BRONKHORST HIGH-TECH B.V.


However, as the accuracy of the factor also depends on viscosity, pressure and temperature, special

attention should be taken for gases in the gas/liquid state where specific heat, density, and viscosity can vary

tremendously. Apply to factory for more detailed information.

For gas mixtures a good approach is the following simplified equation:

1

1

1

2

2

C

V

C

V

C

V

C

mix

n

n

=

+

+

.....

C

mix

= Conversion factor for gasmixture

C

n

= Conversion factor for gas n

V

n

= Volumetric part of gas n in the mixture

Example: Gasmixture contains:

(1) 10%

N

2

C1 = 1.00

(2) 30% Ar

C2 = 1.40

(3) 50%

CH

4

C3 = 0.76

(4) 10% He

C4 = 1.41

1

C

0.10

1.000

0.30

1.40

0.50
0.76

0.10

1.41

1.043

mix

=

+

+

+

=

C

mix

= 0.959

When the original meter has been calibrated on 500

ml

n

/ min N

2

, 100% means:

500 ⋅

=

0.959

1.00

480

ml

n

/ min

mixture.

When the original meter has been calibrated on 500

ml

n

/ min

Argon, then 100% means:

500 ⋅

=

0.959

1.40

343

ml

n

/ min

gas mixture

1.5.1 Software for conversion factor calculation

Bronkhorst High-Tech B.V. gathered the physical properties of over 600 fluids in a database called

FLUIDAT

.

Application software, such as FLUIDAT

on the Net (FOTN), enable the user to calculate accurate

conversion factors, not only at 20°C/1 atm (as shown in the conversion table, App.1) but at any

temperature/pressure combination.

Apply to your distributor for more details of this software.

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