Bronkhorst EX-FLOW Mass Flow - Manual (Page 28)

GAS CONVERSION FACTOR
Nr.: Name: Symbol Density
ρ
n
g l [ / ]
0°C, 1 atm.
Heat capacity*
c cal cal g K
p
− [ / . ]
20°C, 1atm.
Conversion
factor
20°C, 1 atm.
54
55
56
57
58
Helium
Helium (3-)
Hydrogen
Hydrogen bromide
Hydrogen chloride
He
3He
H
2
HBr
HCl
0.1785
0.1346
0.08991
3.646
1.639
1.24
1.606
3.44
0.0869
0.192
1.41
1.44
1.01
0.98
0.99
59
60
61
62
63
Hydrogen cyanide
Hydrogen fluoride
Hydrogen iodide
Hydrogen selenide
Hydrogen sulfide
HCN
HF
HI
H
2
Se
H
2
S
1.206
0.8926
5.799
3.663
1.536
0.345
0.362
0.0553
0.109
0.246
0.75
0.96
0.97
0.78
0.82
64
65
66
67
68
Isobutane
Isobutylene (Isobutene)
Krypton
Methane
Methylacetylene
C
4
H
10
C
4
H
8
Kr
CH
4
C
3
H
4
2.693
2.60
3.749
0.7175
1.83
0.457
0.429
0.058
0.568
0.399
0.25
0.28
1.43
0.76
0.43
69
70
71
72
73
Methylbromide
Methylchloride
Methylfluoride
Methylmercaptan
Molybdenum hexafluoride
CH
3
Br
CH
3
Cl
CH
3
F
CH
3
SH
MoF
6
4.35
2.3
1.534
2.146
9.366
0.118
0.212
0.29
0.272
0.156
0.61
0.64
0.70
0.53
0.21
74
75
76
77
78
Mono-ethylamine
Monomethylamine
Neon
Nitric oxide
Nitrogen
C
2
H
5
NH
2
CH
3
NH
2
Ne
NO
N
2
2.011
1.419
0.9002
1.34
1.250
0.436
0.424
0.246
0.239
0.249
0.36
0.52
1.41
0.97
1.00
79
80
81
82
83
Nitrogen dioxide
Nitrogen trifluoride
Nitrosyl chloride
Nitrous oxide
Oxygen
NO
2
NF
3
NOCl
N
2
O
O
2
2.053
3.182
2.984
1.978
1.429
0.204
0.194
0.17
0.221
0.222
0.74
0.50
0.61
0.71
0.98
84
85
86
87
88
Oxygen difluoride
Ozone
Pentane
Perchlorylfluoride
Perfluoropropane
OF
2
O
3
C
5
H
12
ClO
3
F
C
3
F
8
2.417
2.154
3.219
4.653
8.662
0.201
0.207
0.455
0.165
0.22
0.64
0.70
0.21
0.41
0.16
89
90
91
92
93
Performa- ethylene
Phosgene
Phosphine
Phosphorous pentafluoride
Propane
C
2
F
4
COCl
2
PH
3
PF
5
C
3
H
8
4.523
4.413
1.53
5.694
2.012
0.206
0.149
0.277
0.183
0.456
0.33
0.47
0.73
0.30
0.34
94
95
96
97
98
Propylene (Propene)
Silane
Silicon tetrafluoride
Sulfurylfluoride
Sulfur dioxide
C
3
H
6
SiH
4
SiF
4
SO
2
F
2
SO
2
1.915
1.443
4.683
4.631
2.922
0.408
0.349
0.18
0.175
0.157
0.40
0.62
0.37
0.38
0.68
99
100
101
102
103
Sulfur hexafluoride
Sulfur tetrafluoride
Trichlorosilane
Trimethylamine
Tungsten hexafluoride
SF
6
SF
4
SiHCl
3
C
3
H
9
N
WF
6
6.626
4.821
6.044
2.637
13.29
0.175
0.192
0.157
0.424
0.092
0.27
0.34
0.33
0.28
0.25
104
105
106
107
Vinylbromide
Vinylchloride
Vinylfluoride
Xenon
C
2
H
3
Br
C
2
H
3
Cl
C
2
H
3
F
Xe
4.772
2.865
2.08
5.899
0.141
0.229
0.305
0.0382
0.46
0.47
0.49
1.38
* c
p
- cal (T,p) = c
p
(T + 50°C, p)
App. 1, page 4