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INFICON Stripe CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr User Manual

Page 6

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6

tina84e1 (2014-07)

Contents

Product Identification

2

Validity 3

Intended Use

4

Functional Principle

4

Trademarks 4

Patents 5

Scope of Delivery

5

1

Safety 8

1.1

Symbols Used

8

1.2

Personnel Qualifications

8

1.3

General Safety Instructions

9

1.4

Liability and Warranty

9

2

Technical Data

10

3

Installation 16

3.1

Vacuum Connection

16

3.2

Power Connection

19

3.2.1

D-Sub, 15-pin Connector

20

3.2.2

EtherCAT Connector

21

3.2.3

Mini USB Type B Connector (Diagnostic Port)

22

4

Operation 23

4.1

Status Indication

23

4.2

Zeroing the Gauge

24

4.2.1

Adjustment

24

4.3

Switching Functions SP1, SP2

28

4.4

Error Status

32

4.5

ATM Setpoint

33

4.6

Activating the Factory Setting (Factory Reset)

34

4.7

Diagnostic Port (USB Interface)

35

4.8

EtherCAT Operation

36

5

Deinstallation 37

6

Maintenance, Repair

39