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Further information – INFICON Stripe CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr User Manual

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tina84e1 (2014-07)

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Further Information

[1] www.inficon.com

Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein

[2] www.inficon.com

Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein

[3] www.inficon.com

Communication Protocol
EtherCAT CDGxxxDxx
tira68e1
INFICON AG, LI–9496 Balzers, Liechtenstein

[4] www.inficon.com

Kommunikationsanleitung
Diagnostic Port via T-Gauge
tira84e1
INFICON AG, LI–9496 Balzers, Liechtenstein

[5] ETG.5003.1: Semiconductor Device profile – Part 1:

Common Device Profile (CDP)

[6] ETG.5003.2080: Semiconductor Device profile – Part

2080: Specific Device Profile (SDP): Vacuum Pressure
Gauge