INFICON SQC-122C Thin Film Deposition Controller Operating Manual - Manual (Page 59)

Appendix
B. Specifications
Measurement
Number of Sensors
Frequency Range
Frequency Accuracy
Frequency Resolution
Rate Accuracy
Rate Resolution
Thickness Accuracy
Thickness Resolution
Measurement Period
2
4.0 MHz to 6.0 MHz
.01% @ 2 readings/sec.
.06 Hz @ 2 readings/sec
.5% typical
.01/.1
?/s
.5% typical
1
?
.1 to 1 sec.
Source
Number of Sources
Control Voltage
Resolution
2
0 to ±10V into 2k
?
load
15 bits
Digital I/ O
Digital Inputs
Functions
Input Rating
Relay Outputs
Functions
Relay Rating
8
User Programmed (See Chapter 3)
5VDC, non-isolated
8
User Programmed (See Chapter 3)
30Vrms or 30VDC, 2A maximum
General Specifications
Mains Power Supply
Power Consumption
Operating & Transportation
Environment
Storage Environment
Rack Dimensions (HxWxD)
Weight
100-120/200-240~, ±10% nominal
50/60 Hz
25W
0
?C to 50?C
0 to 80% RH non-condensing
0 to 2,000 meters
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected
? against harmful ingress of moisture)
Pollution Degree II
Installation (Overvoltage) Category II
? for transient overvoltages
- 4 0
?C to 70?C
5.23 in. x 8.4 in. x 10.0 in.
132.8mm x 213.4m x 254.0mm
4 pounds (1.8 kg)