Chapter 1 quick start, 5 installation – INFICON SQC-122C Thin Film Deposition Controller Operating Manual User Manual
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Chapter 1
Quick Start
1-5
1.5 Installation
W
ARNING
: Care should be exercised to route SQC-122c cables as far as practical from
other cables that carry high voltages or generate noise. This includes other line voltage
cables, wires to heaters that are SCR-controlled, and cables to source power supplies
that may conduct high transient currents during arc down conditions.
Rack
Installation
The SQC-122c occupies a 5.25” high, half-rack space. An
optional installation kit is available to adapt to a full rack (see
Chapter 4). Install the unit in a 19” rack with the supplied
hardware.
Power
Connection
The SQC-122c automatically detects mains voltages of 100-
120 and 200-240VAC, 50/60Hz.
W
ARNING
: Verify that the power cable provided is connected to
a properly grounded mains receptacle.
Sensor Input
Connections
Connect the BNC cables and oscillators from your vacuum
chamber feedthrough to the desired SQC-122c sensor inputs.
Source Output
Connections
Connect the BNC cables from the SQC-122c output
connectors to your evaporation supply control input.
Digital I/O
Connections
Refer to Appendix C for details on wiring digital I/O to the SQC-
122c Relay I/O connectors.
Computer
Connection
If you would like to use the Windows software to collect data or
program the SQC-122c, attach a 9 pin straight-thru cable from
the RS-232 connector to your computer’s serial port.