Chapter 2 operation – INFICON SQC-122C Thin Film Deposition Controller Operating Manual User Manual
Page 20
Chapter 2
Operation
2-6
Initial Rate and Final Thickness are the main process setpoints for this layer of material.
Keep in mind that the SQC-122c zeroes thickness at the beginning of each layer. It is
not a cumulative value.
Time Setpoint and Thickness Limit are arbitrary values that will activate a relay when
they are reached.
Start mode allows you to have this layer start immediately on completion of the previous
layer, Auto mode. Manual mode waits for a user signal via the front panel, RS-232, or
digital input to start the layer.
Rate Ramps allow the deposition rate to change over time, under PID control. Each
rate ramp has a starting thickness, an elapsed time to ramp to the new rate, and a new
rate setpoint. Each process layer can have up to two rate ramps.
Press Prev Menu to return to the list of layers, or Exit to Main to return to the Main
Screen.
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