INFICON SQC-122C Thin Film Deposition Controller Operating Manual - Manual (Page 23)

Chapter 2 Operation
2-9
Once the sensor parameters are set, test your sensor setup to assure reliable readings
at the SQC-122c. A typical single sensor setup is shown below:
On the SQC-122c, press Next Menu until the Sensor Info option is shown, then press
Sensor Info.
Any connected sensor (whether programmed On or Off) should display its frequency
and % remaining life, as defined by Min and Max Frequency setup. For a new sensor,
the value should be near 100%. If the % Life is 0.00% or jumps around, check your
cabling and the installation of the sensor in its holder.
Sigma supplies a small 5.5MHz “test crystal adapter” with each oscillator. If the % Life
reading is not correct, remove the 6” BNC that is connected to your feedthrough at the
oscillator. Connect the test crystal and adapter to the oscillator connector labeled
feedthrough. For a typical setup of 6MHz Max Frequency and 5MHz Min Frequency,
the % life display should be near 50%.
More information on locating system and sensor problems is described in the
Troubleshooting section, later in this chapter.