Detcon 10C User Manual
Page 10

Model 10C
Table 1 10C Controller Models
Model #
Target Gas
Standard Range
Formula
AsH3-10 Arsine 0-1
PPM AsH3
Br2-10 Bromine
0-5
PPM
Br2
B2H6-10 Diborane 0-5
PPM B2H6
CG–10
Combustible Gases
0-100 % LEL
various
CH20-10 Formaldehyde
0-100
PPM
CH20
CH30H-10 Methanol 0-100
PPM CH30H
CH3SH-10 Methyl
Mercaptan
0-100
PPM CH3SH
CLO2-10
Chlorine Dioxide
0-1 PPM
CLO2
CL2-10 Chlorine 0-10
PPM
CL2
CO-10 Carbon
Monoxide
0-100
PPM
CO
COCL2-10 Phosgene 0-1
PPM COCL2
CO2-10
Carbon Dioxide
0-1 %
CO2
CS-10 Carbonyl
Sulfide
0-100
PPM
CS
CS2-10 Carbon
Disulfide
0-100
PPM
CS2
C2H2-10 Acetylene 0-100
PPM
C2H2
C2H3CL-10 Vinyl
Chloride
0-100
PPM C2H3CL
C2H30-10 Acetyldehyde
0-100
PPM C2H30
C2H4-10 Ethylene 0-100
PPM
C2H4
C2H4O-10 Ethylene
Oxide
0-100
PPM C2H4O
C2H5OH-10 Ethanol
0-100
PPM C2H5OH
C2H6S-10 Dimethyl
Sulfide
0-100
PPM C2H6S
C3H3N-10 Acrylonitrile
0-100
PPM C3H3N
C3H5OCL-10 Epichlorohydrin
0-10
PPM
C3H5OCL
C4H4S-10 Thiophane 0-100
PPM C4H4S
C4H6-10 Butadiene 0-100
PPM
C4H6
C4H8S-10 Tetrahydrothiophene
0-100
PPM C4H8S
C4H6O2-10 Vinyl
Acetate
0-100
PPM C4H6O2
F2-10 Fluorine
0-1
PPM
F2
GeH4-10 Germane 0-2
PPM GeH4
HBr-10
Hydrogen Bromide
0-30 PPM
HBr
HCL-10
Hydrogen Chloride
0-30 PPM
HCL
HCN-10
Hydrogen Cyanide
0-30 PPM
HCN
HF-10
Hydrogen Fluoride
0-10 PPM
HF
H2S-100 Hydrogen
Sulfide
0-100PPM
H2S
H2-10 Hydrogen
0-100
PPM
H2
H2-10
LEL Hydrogen
0-100 %
H2
NH3-10 Ammonia
0-100
PPM
NH3
NO-10 Nitric
Oxide
0-100
PPM
NO
NO2-10
Nitrogen Dioxide
0-5 PPM
NO2
N2H4-10 Hydrazine 0-1
PPM N2H4
O2-10 Oxygen
0-25
% O2
O3-10 Ozone 0-1
PPM
O3
PH3-10 Phosphine
0-5
PPM PH3
SiH4-10 Silane 0-50
PPM
SiH4
SO2-10
Sulfur Dioxide
0-20 PPM
SO2
10C Control Module Instruction Manual Rev.0.B
Page 6 of 25