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Detcon 10C User Manual

Page 10

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Model 10C

Table 1 10C Controller Models

Model #

Target Gas

Standard Range

Formula

AsH3-10 Arsine 0-1

PPM AsH3

Br2-10 Bromine

0-5

PPM

Br2

B2H6-10 Diborane 0-5

PPM B2H6

CG–10

Combustible Gases

0-100 % LEL

various

CH20-10 Formaldehyde

0-100

PPM

CH20

CH30H-10 Methanol 0-100

PPM CH30H

CH3SH-10 Methyl

Mercaptan

0-100

PPM CH3SH

CLO2-10

Chlorine Dioxide

0-1 PPM

CLO2

CL2-10 Chlorine 0-10

PPM

CL2

CO-10 Carbon

Monoxide

0-100

PPM

CO

COCL2-10 Phosgene 0-1

PPM COCL2

CO2-10

Carbon Dioxide

0-1 %

CO2

CS-10 Carbonyl

Sulfide

0-100

PPM

CS

CS2-10 Carbon

Disulfide

0-100

PPM

CS2

C2H2-10 Acetylene 0-100

PPM

C2H2

C2H3CL-10 Vinyl

Chloride

0-100

PPM C2H3CL

C2H30-10 Acetyldehyde

0-100

PPM C2H30

C2H4-10 Ethylene 0-100

PPM

C2H4

C2H4O-10 Ethylene

Oxide

0-100

PPM C2H4O

C2H5OH-10 Ethanol

0-100

PPM C2H5OH

C2H6S-10 Dimethyl

Sulfide

0-100

PPM C2H6S

C3H3N-10 Acrylonitrile

0-100

PPM C3H3N

C3H5OCL-10 Epichlorohydrin

0-10

PPM

C3H5OCL

C4H4S-10 Thiophane 0-100

PPM C4H4S

C4H6-10 Butadiene 0-100

PPM

C4H6

C4H8S-10 Tetrahydrothiophene

0-100

PPM C4H8S

C4H6O2-10 Vinyl

Acetate

0-100

PPM C4H6O2

F2-10 Fluorine

0-1

PPM

F2

GeH4-10 Germane 0-2

PPM GeH4

HBr-10

Hydrogen Bromide

0-30 PPM

HBr

HCL-10

Hydrogen Chloride

0-30 PPM

HCL

HCN-10

Hydrogen Cyanide

0-30 PPM

HCN

HF-10

Hydrogen Fluoride

0-10 PPM

HF

H2S-100 Hydrogen

Sulfide

0-100PPM

H2S

H2-10 Hydrogen

0-100

PPM

H2

H2-10

LEL Hydrogen

0-100 %

H2

NH3-10 Ammonia

0-100

PPM

NH3

NO-10 Nitric

Oxide

0-100

PPM

NO

NO2-10

Nitrogen Dioxide

0-5 PPM

NO2

N2H4-10 Hydrazine 0-1

PPM N2H4

O2-10 Oxygen

0-25

% O2

O3-10 Ozone 0-1

PPM

O3

PH3-10 Phosphine

0-5

PPM PH3

SiH4-10 Silane 0-50

PPM

SiH4

SO2-10

Sulfur Dioxide

0-20 PPM

SO2

10C Control Module Instruction Manual Rev.0.B

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