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Brooks Instrument SLA7810/20 User Manual

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Model SLA7810 & SLA7820

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Contents

Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008

Paragraph

Page

Number

Number

Section 1 Introduction

1-1

Scope ............................................................................................................................................. 1-1

1-2

Description ..................................................................................................................................... 1-1

1-3

Principle of Operation ..................................................................................................................... 1-2

1-4

Specifications ................................................................................................................................. 1-8

1-5

Controller Specifications ................................................................................................................. 1-9

Section 2 Installation

2-1

General .......................................................................................................................................... 2-1

2-2

Receipt of Equipment ..................................................................................................................... 2-1

2-3

Recommended Storage Practice .................................................................................................... 2-1

2-4

Return Shipment ............................................................................................................................ 2-2

2-5

Transit Precautions ......................................................................................................................... 2-2

2-6

Typical Configuration ...................................................................................................................... 2-2

2-7

Gas Process Connections .............................................................................................................. 2-2

2-8

Installation Procedures ................................................................................................................... 2-3

2-9

In-Line Filter ................................................................................................................................... 2-4

2-10

Electrical Interface .......................................................................................................................... 2-4

2-11

Remote Setpoint (Command) Input Analog Mode .......................................................................... 2-5

Section 3 Operation

3-1

Overview ........................................................................................................................................ 3-1

3-2

Proportional Band and Integration Time Constant Adjustment ....................................................... 3-2

Section 4 Maintenance

4-1

Overview ........................................................................................................................................ 4-1

4-2

Troubleshooting .............................................................................................................................. 4-2

Section A CE Certification

CE Certification of Mass Flow Equipment ....................................................................................... A-1

FIGURES

Figure

Page

Number

Number

1-1

Model SLA7810/SLA7820 Pressure Transducer ............................................................................ 1-2

1-2

Model SLA7810/SLA7820 Silicon Chip Configuration ..................................................................... 1-3

1-3

Model SLA7810/SLA7820 System Block Diagram ......................................................................... 1-3

1-4

Models SLA7810A and SLA7820A Analog I/O Controller with 1/4” VCR Connections ................... 1-4

1-5

Models SLA7810D and SLA7820AD Digital I/O DeviceNet Controller with 1/4” VCR Connections .... 1-4

1-6

Model SLA7820 Controller Upstream ............................................................................................. 1-5

1-7

Model SLA7810 Controller Downstream ......................................................................................... 1-5

1-8

Typical Application of Upstream Controller ..................................................................................... 1-6

2-1

Common Electrical Connections, Analog I/O .................................................................................. 2-5