Brooks Instrument SLA7810/20 User Manual

Page 17

2-1

Section 2 Installation

Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008

Model SLA7810 & SLA7820

2-1 General

This section provides installation instructions for the Brooks Model
SLA7810/20 PC. Figure 1-2 through Figure 1-8 show the Model SLA7810/
20 dimensions, gas connections and electrical connection locations for an
MFC.

2-2 Receipt of Equipment

When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to your nearest Product Service Department.

Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-mail: [email protected]
www.BrooksInstrument.com

Brooks Instrument

Neonstraat 3

1-4-4 Kitasuna Koto-Ku

6718 WX Ede, Netherlands

Tokyo, 136-0073 Japan

P.O. Box 428

Tel 011-81-3-5633-7100

6710 BK Ede, Netherlands

Fax 011-81-3-5633-7101

Tel 31-318-549-300

Email: [email protected]

Fax 31-318-549-309
E-mail: [email protected]

Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare
parts are not discarded with the packing material. Inspect for damaged or
missing parts.

This device has been assembled, calibrated and double-vacuum bagged in
a Class 100 clean room. In your semi-clean area,remove the outer bag
only. Pass your Model SLA7810/20 Metal Seal Pressure Controller into
your clean area. Remove the second clean room compatible bag only
when the equipment is ready to be tested and/or installed in your clean
system.

2-3 Recommended Storage Practice

If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following:

a. In the original vacuum bag and shipping container.
b. In a sheltered area with the following conditions:
1. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum

and 7°C (45°F) minimum.

2. Relative humidity 45% nominal, 60% maximum and 25% minimum.