Brooks Instrument SLA7810/20 - Manual (Page 13)

1-7
Section 1 Introduction
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
1-4 Specifications
Pressure Ranges
7.25 psia to 290 psia full scale (Metal Seals)
Flow Rates
0-30,000 sccm* (Nitrogen Equivalent).
*Standard pressure and temperature in accordance with SEMI
(Semiconductor Equipment and Materials Institute) standard: 32°F (0°C)
and 101 kPa (760 Torr). Other reference conditions available upon request.
Accuracy
±0.5% F.S., including linearity and
hysteresis for precision control
Repeatability
±0.1% full scale
Control Range
20:1
Zero Stability
0.1% full scale per 30 days
Ambient Temperature Limits
Operating: 0°C to 60°C (32°F to 140°F)
Non-operating: -25°C to 100°C (-13°F to 212°F)
Temperature Sensitivity
±0.1% of F.S. per °C
Maximum Transducer Pressure
21.75 psia for 0-14.5 psia range
108.5 psia for 14.5-72.5 psia range
435 psia for 72.5-290 psia range
Maximum Design Pressure
500 psig
Pressure Equipment Directive (PED) 97/23/EC:
Equipment falls under Sound Engineering Practice (SEP)