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Brooks Instrument SLA7810/20 User Manual

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Section 1 Introduction

Model SLA7810 & SLA7820

Installation and Operation Manual

X-PR-SLA7800-PC-eng

Part Number: 541B047AAG

December, 2008

Maximum Fluid Operating Temperature
0°C to 65°C (32°F to 149°F)

Leak Integrity
Inboard to Outboard: 1x10-10 atm scc/sec Helium max.

1-5 Controller Specifications

Digital software
Can store 10 selectable P and I settings.

Input/Output Offset
< 0.2% full scale (voltage)

Proportional Gain
User adjustable via Service port or over DeviceNet interface.

Integration Time
User adjustable via Service port or over DeviceNet interface.

Control Action
Upstream or downstream pressure control

Materials of Construction
316L VAR, 316L, and high-alloy
ferritic stainless steel.
External/internal seals: nickel
Valve seat: 316L stainless steel
Internal wetted Surface Finish 32 Ra.