Atec ENI-PL Series - Manual (Page 4)

PC-1/PC-2 Plasma Convertors
The PC-1 and PC-2 Plasma Convertors are add-on networks which, when inserted between the output of any low-
frequency ENI plasma generator and any parallel plate plasma reactor, enable the simultaneous combination of radio
frequency and DC power for added flexibility. These units prevent the generator's output power from flowing back
into the external DC power supply, permitting the use of any laboratory DC power supply and eliminating the
possibility of interference with its regulatory circuitry.
The combination of radio frequency and DC voltage in the plasma chamber enhances the plasma sheath for
processes such as reactive ion etching. The PC-1 and PC-2 come complete with a five-foot output coaxial cable for
direct connection to the plasma chamber.
LK-1 External Transformer
The LK-1 External Transformer raises the maximum output impedance of the matched plasma load to 1350 ohms. For
use with difficult-to-ionize gases and/or low pressures; for PL-1 and PL-2 only.
PL-201 Rack Mount Slide Kit
The PL-201 Rack Mount Slide Kit installs into a standard 19-inch rack and provides slide-out capability for the PL-2
and PL-2HF.
PL-301 Rack Mount Slide Kit
The PL-301 Rack Mount Slide Kit installs into a standard 19-inch rack and provides slide-out capability for the PL-3
and PL-3HF.
PL-202 Coaxial Cable
PL-202 RG-8/U Coaxial Cable is cut to length and fitted with Type C male connections between the generator and
the plasma reactor.
All specifications subject to change without notice. Printed in the USA 3/90