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Atec ENI-PL Series User Manual

Atec Equipment

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Versatile,

Low-Frequency

R F Power

Sources For

Plasma

Applications

• 25-125kHz or 90-460kHz

Frequency Range

• Forward & Load

Power Leveling

• Forced-Air Cooling
• Solid State Reliability

• Variable Frequency Control
• Built-In Matching Transformer