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A tions, Advanced protection, Additional options – Atec ENI-PL Series User Manual

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PL-2HF Rear- Panel

a tions

RF OUTPUT CONNECTOR:

Type C

RACK MOUNTING:

19" adaptors

provided; PL2-01/PL3-01 rack mount slide
kits optional.

COOLING SYSTEM:

Forced air;

operating temperature range of 0-45°C.

REAR PANEL CONTROLS
& INDICATORS:

RF Output (Type C),

Remote Start, Control Interface Connector,
I nternal/External Power Adjust, Frequency

Counter (Type BNC)

FRONT PANEL CONTROLS
& INDICATORS:

AC On, Power Meter,

Forward/Load Meter Switch, Power Level,
Remote On/Off, Overload/Push to Reset

output, and effectively prevents a total loss of power. In the
event that any individual transistor should fail to operate, th

generator will continue to function at reduced power.

Advanced Protection

ENI Plasmaloc Generators are protected from damage

due to any external load impedance, from an open to a short

circuit. Protection is also provided from excessive internal
voltage and current conditions, as well as overheating due to
high ambient temperatures or lack of air cooling. Maintenani
and service are facilitated by the use of plug-in modules, full
socketed transistors, and integrated circuits. The hazardous
potentials normally associated with vacuum tube design havi
been completely eliminated. Both the integral power supply
and forced-air cooling system are conservatively rated to

permit operation over a wide range of temperatures and AC
line conditions. ENI Plasmaloc Generators may be mounted
a standard 19-inch relay rack or used as free-standing units.

Extensive use of RFI/EMI filtering and/or shielding, as

well as the relatively low operating frequencies of the
generators, minimizes the possibility of RF interference
problems associated with plasma reactor pressure measuring,
flow controller, or computer circuits. High voltage regulators
eliminate spikes and noise present on industrial power lines,

and prevent interference from reaching the AC line.

Additional Options

Optional Plasmaloc accessories include the PC-1 and

PC-2 Plasma Convertors, which permit the simultaneous

combination of RF and DC power for maximum flexibility
and versatility. The optional LK-I External Transformer, for
use with the PL- I and PL-2, raises the maximum output
i mpedance of the matched plasma load to 135052.

Each PL and PL-HF Generator is. backed by ENI's one-

year warranty and worldwide network of service and technica
support. Plasmaloc Series Generators represent ENI's ongoing
commitment to provide versatile, reliable solid state RF
solutions for modem plasma applications.