Atec ENI-PL Series - Manual (Page 2)

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PL-2HF Front Panel
FREQUENCY STABILITY: Better than
0.1 % from 0° to 45° C ambient after 5-minute
warm-up.
POWER LEVELING: Forward or Load
( Plasma), Switch Selectable
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T 1 he Plasmaloc Series of RF Generators is designed to
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. provide dependable RF power for low-frequency
plasma applications. Featuring forward and load
power leveling, variable frequency control, thermal and
mismatch protection, forced-air cooling, and fail-soft
capability, the Plasmaloc Series has set the standard for solid
state quality, versatility; and reliability.
PLASMA MATCHING: Built-in variable
7-position step transformer for plasma
i mpedances between 50 and 600 ohms.
THERMAL PROTECTION: Provides
automatic shutdown if transistors overheat
due to mismatch or cooling system failure.
Versatile Operation
The Plasmaloc Series consists of six generators: three PL
models which cover the frequency range of 25-125kHz; and
three PL-HF models which cover the range of 90-460kHz.
The optimum frequency for a specific plasma reaction is
easily selected with the front panel variable frequency control.
Maximum forward power output ranges from 750 to 3,200
Watts, depending on the model. The front panel power meter
displays either the forward power leaving the generator or the
load power absorbed by the plasma.
Precise Power Control
Precise power control is provided by a sampling of the
output power, using a directional coupler. Both forward and
load power leveling are provided and may be set from either
the front panel or by a process computer through the
accessory input. Setability of the plasma power is better than
±0.4% of the maximum rated power, and absolute accuracy
is better than ±1.5% of the maximum rated power.
To eliminate the need for an external impedance
matching network, each Plasmaloc generator includes an
internal variable seven-position step transformer, designed for
plasma impedances between 50 and 600 ohms. By adjusting the
front panel plasma impedance control knob and observing the
increase in load power, an optimum match can easily be
achieved.
CONTROL INTERFACE:
Type D, 9-pin connector
RF OUTPUT IMPEDANCE: 50-600 ohms
A high degree of operational reliability is assured through
the use of conservatively rated solid state components. ENI's
hybrid combining of power amplifier modules couples the
output of a number of transistors to achieve the total generator
Quality-... Rehab