Atec Agilent-E5260A - Manual (Page 5)

5
Output terminal/connection:
Triaxial connector, Kelvin (remote
sensing)
Voltage/current
compliance(limiting)
The SMU can limit output voltage
or current to prevent damaging the
device under test.
Voltage: 0 V to ± 200 V
Current: ± 100 pA to ± 1 A
Compliance accuracy: Same as the
current (or voltage) set accuracy.
HPSMU supplemental information
Maximum allowable cable resistance
(Kelvin connection):
Force line: 10 Ω (I ≤ 100 mA)
Force line: 1.5 Ω (100 mA < I ≤ 1 A)
Sense line: 10 Ω (All cases)
Voltage source output resistance:
0.2 Ω typical (Force line, non-Kelvin
connection)
Power consumption (HPSMU)
Voltage source mode:
Voltage range Power
2 V 20 x Ic (W)
20 V 20 x Ic (W)
40 V 40 x Ic (W)
100 V 100 x Ic (W)
200 V 200 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance Power
Vc ≤ 20 20 x Io (W)
20 < Vc ≤ 40 40 x Io (W)
40 < Vc ≤ 100 100 x Io (W)
100 < Vc ≤ 200 200 x Io (W)
Where Vc is the voltage compliance setting
and Io is output current.
HPSMU measurement and output range
Voltage measurement input resistance:
≥
10 13 Ω
Current source output resistance:
≥
10 13 Ω (1 nA range)
Current compliance setting accuracy
(for opposite polarity):
For 1 nA to 10 nA ranges:
I setting accuracy ± 12 % of range
For 100 nA to 1 A ranges:
I setting accuracy ± 2.5 % of range
Maximum capacitive load:
For 100 nA to 10 mA ranges: 10 nF
For 100 mA to 1 A ranges: 100 µF
Maximum guard capacitance: 900 pF
Maximum shield capacitance: 5000 pF
Maximum guard offset voltage: ± 1 mV
Noise characteristics (typical, filter ON):
Voltage source: 0.01 % of V range
(rms)
Current source: 0.1 % of I range (rms)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise
(typical, filter ON):
Voltage ranging: 250 mV
Current ranging: 10 mV
Slew rate: 0.2 V/µs
SMU pulse setting accuracy
(fixed measurement range):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
Trigger out delay (pulsed
measurements):
0 to 32.7 ms with 100 µs resolution
(< pulse width)
1000
500
125
50
-50
-125
-500
-1000
-200 -100 -40 -20 20 40 100 200
Current (mA)
Voltage (V)