Atec Agilent-E5260A - Manual (Page 3)

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MPSMU (Medium Power SMU) Module Specifications
Voltage range, resolution, and accuracy (MPSMU)
Voltage range Force
resolution Measure
resolution Force accuracy 1 Measure accuracy 1 Maximum
current
±2 V 100 µV 100 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) 200 mA
±20 V 1 mV 1 mV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) 200 mA
±40 V 2 mV 2 mV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV) 2
±100 V 5 mV 5 mV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV) 3
1. ± (% of output/measured value + offset voltage)
2. 200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), Vo is the output voltage in volts.
3. 200 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in volts.
Current range, resolution, and accuracy (MPSMU)
Current range Force
resolution
Measure
resolution
4
Force accuracy 1 Measure accuracy 1,2 Maximum
voltage
±100 nA 5 pA 5 pA ±(0.12 % + 50 pA + 5 pA x (Vo/25)) ±(0.1 % + 30 pA + 5 pA x (Vo/25)) 100 V
±1 µA 50 pA 50 pA ±(0.12 % + 400 pA + 50 pA x (Vo/25)) ±(0.1 % + 200 pA + 50 pA x (Vo/25)) 100 V
±10 µA 500 pA 500 pA ±(0.12 % + 5 nA + 500 pA x (Vo/25)) ±(0.1 % + 3 nA + 500 pA x (Vo/25)) 100 V
±100 µA 5 nA 5 nA ±(0.12 % + 40 nA + 5 nA x (Vo/25)) ±(0.1 % + 20 nA + 5 nA x (Vo/25)) 100 V
±1 mA 50 nA 50 nA ±(0.12 % + 500 nA + 50 nA x (Vo/25)) ±(0.1 % + 300 nA + 50 nA x (Vo/25)) 100 V
±10 mA 500 nA 500 nA ±(0.12 % + 4 µA + 500 nA x (Vo/25)) ±(0.1 % + 2 µA + 500 nA x (Vo/25)) 100 V
±100 mA 5 µA 5 µA ±(0.12 % + 50 µA + 5 µA x (Vo/25)) ±(0.1 % + 30 µA + 5 µA x (Vo/25)) 3
±200 mA 10 µA 10 µA ±(0.12 % + 100 µA + 10 µA x (Vo/50)) ±(0.1 % + 60 µA + 10 µA x (Vo/50)) 4
1. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
2. Round up below decimal point for the value of (Vo/25) and (Vo/50)
3. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in amps.
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 200 mA), Io is the output current in amps.
MPSMU measurement and output range
200
50
20
-20
-50
-200
-100 -40 -20 20 40 100
Current (mA)
Voltage (V)
Power consumption (MPSMU)
Voltage source mode:
Voltage range Power
2 V 20 x Ic (W)
20 V 20 x Ic (W)
40 V 40 x Ic (W)
100 V 100 x Ic (W)
Where Ic is the current compliance setting.
Current source mode:
Voltage compliance Power
Vc ≤ 20 20 x Io (W)
20 < Vc ≤ 40 40 x Io (W)
40 < Vc ≤ 100 100 x Io (W)
Where Vc is the voltage compliance setting
and Io is output current.