Atec Agilent-E5260A - Manual (Page 4)

4
Output terminal/connection:
Triaxial connector, Kelvin (remote
sensing)
Voltage/current compliance (limiting)
The SMU can limit output voltage
or current to prevent damaging the
device under test.
Voltage: 0 V to ± 100 V
Current: ± 100 pA to ± 200 mA
Compliance accuracy: Same as the
current (or voltage) set accuracy.
MPSMU supplemental information
Maximum allowable cable resistance
(Kelvin connection):
Force Line: 10 Ω (I ≤ 100 mA)
Force Line: 1.5 Ω
(100 mA < I ≤ 200 mA)
Sense Line: 10 Ω (All cases)
Voltage source output resistance:
0.3 Ω typical (Force line, non-Kelvin
connection)
Voltage measurement input resistance:
≥ 10 13 Ω
Current source output resistance:
≥ 10 13 Ω (1 nA range)
Current compliance setting accuracy
(for opposite polarity):
For 100 nA to 200 mA ranges:
I setting accuracy ± 2.5 % of range
Maximum capacitive load:
For 100 nA to 10 mA ranges: 10 nF
For 100 mA to 200 mA ranges: 100 µF
Maximum guard capacitance: 900 pF
Maximum shield capacitance: 5000 pF
Maximum guard offset voltage: ± 1 mV
Noise characteristics (typical, filter ON):
Voltage
source:
0.01 % of V range (rms)
Current source: 0.1 % of I range (rms)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise
(typical, filter ON):
Voltage ranging: 250 mV
Current ranging: 10 mV
Slew rate: 0.2 V/µs
SMU pulse setting accuracy
(fixed measurement range):
Width: 0.5 % + 50 µs
Period: 0.5 % + 100 µs
Trigger out delay (pulsed
measurements):
0 to 32.7 ms with 100 µs resolution
(< pulse width)
HPSMU (High Power SMU) Module Specifications
Voltage range, resolution, and accuracy (HPSMU)
Voltage
range Force
resolution Measure resolution Force accuracy 1 Measure accuracy 1 Maximum
current
±2 V 100 µV 100 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) 1 A
±20 V 1 mV 1 mV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) 1 A
±40 V 2 mV 2 mV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV) 2
±100 V 5 mV 5 mV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV) 3
±200 V 10 mV 10 mV ±(0.045 % + 30 mV) ±(0.035 % + 40 mV) 4
1. ± (% of output/measured value + offset voltage V)
2. 1 A (Vo ≤ 20 V), 500 mA (20 V 3. 1 A (Vo ≤ 20 V), 500 mA (20 V 4. 1 A (Vo ≤ 20 V), 500 mA (20 V
Current range, resolution, and accuracy (HPSMU)
Current
range Force
resolution Measure
resolution Force accuracy 1,2 Measure accuracy 1,2 Maximum
voltage
±100 nA 5 pA 5 pA ±(0.12 % + 50 pA + 5 pA x (Vo/25)) ±(0.1 % + 30 pA + 5 pA x (Vo/25)) 200 V
±1 µA 50 pA 50 pA ±(0.12 % + 400 pA + 50 pA x (Vo/25)) ±(0.1 % + 200 pA + 50 pA x (Vo/25)) 200 V
±10 µA 500 pA 500 pA ±(0.12 % + 5 nA + 500 pA x (Vo/25)) ±(0.1 % + 3 nA + 500 pA x (Vo/25)) 200 V
±100 µA 5 nA 5 nA ±(0.12 % + 40 nA + 5 nA x (Vo/25)) ±(0.1 % + 20 nA + 5 nA x (Vo/25)) 200 V
±1 mA 50 nA 50 nA ±(0.12 % + 500 nA + 50 nA x (Vo/25)) ±(0.1 % + 300 nA + 50 nA x (Vo/25)) 200 V
±10 mA 500 nA 500 nA ±(0.12 % + 4 µA + 500 nA x (Vo/25)) ±(0.1 % + 2 µA + 500 nA x (Vo/25)) 200 V
±100 mA 5 µA 5 µA ±(0.12 % + 50 µA + 5 µA x (Vo/25)) ±(0.1 % + 30 µA + 5 µA x (Vo/25)) 3
±1 A 50 µA 50 µA ±(0.5 % + 500 µA + 50 µA x (Vo/25)) ±(0.5 % + 300 µA + 50 µA x (Vo/25)) 4
1. ± (% of output/measured value + offset current A (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo)
2. Round up below decimal point for the value of (Vo/25).
3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 100 mA)
4. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in amps.