Trek 645 Electrostatic Chuck Supply - Manual (Page 2)

Features
Clamped Wafer
Detection Feature
(Thresholds are set
by the program) To indicate wafer clamping events, the
capacitive currents generated by a low voltage
sine wave, super-imposed on the Phase A and
Phase B outputs, are monitored but can be
disabled through the program. The super-
imposed waveform is used to indicate a no
wafer, wafer present or wafer clamped status
Capacitive Load
Select Clamped capacitance status range can be
selected by the program for 0 to 10, 20 or 30nF
(phase to phase) depending on the system and
electrostatic clamp physical configurations
Mechanical
Dimensions 43.7 mm H x 421.6 mm W x 457.3 mm D
(1.72” H x 16.6” W x 18” D) 1U rack enclosure
Panel Width 482.6 mm (19”)
Weight 8.5 lbs (3.86 kg)
Connectors 15-pin “D” ITT Canon used by remote device to
control/monitor the unit, 9-pin “D” ITT Canon RS-
232, 3-Pin FCT “D” High-Voltage, standard type-A
USB, Ethernet (optional) and Front Panel
Power ON/OFF 2-position rocker switch
Operating Conditions
Temperature 0°C to 35°C (32°F to 104°F)
Relative Humidity To 85%, noncondensing
Altitude To 2000 meters (6561.68 ft.)
Electrical
DC Input Receptacle 2.0 mm locking DC jack; center contact is
positive and shell is negative (receptacle mates
with Switchcraft S761K plug)
Ground Receptacle Ground stud
Power Requirements 24 V DC, 1.7 A
Supplied Accessories
Operator Manual, SW PN: 24010
USB Cable
HV Connectors PN: BA103
PN: B8084R, B8085R, B8088R, B8089R
DC Plug (
S761K) Switchcraft PN: BA119R
Line Cord, Fuses Selected per geographic destination
Optional Accessories
90-264 V AC to
24 V DC Power
Adapter PN: IK045
Note
Trek Model 646, a
Please contact the factory for more information ±3 kV version of this instrument, is also available.
Copyright ã 2012 TREK, INC. All specifications are subject to change. 1305/JRB
Model 645 Specifications
Outputs
Simultaneous High-
Voltage Outputs Two simultaneous high-voltage outputs (Output
Phase A and Output Phase B) of equal
magnitude and opposite in polarity relative to
an offset voltage
Output Phasing
Output Voltage A
(Reference Phase) 0 to ±2 kV
Output Voltage B 0 to ±2 kV (Phase B =[-1] x Phase A)
Offset Voltage An offset voltage of up to ±2 kV may be
simultaneously added to the output of each
phase. When an offset voltage is added, the
polarity and magnitude of offset voltage
appears simultaneously on both outputs A and
B regardless of the magnitude and polarity of
the A and B voltages themselves. The sum of
the offset voltage and the output voltage of
each phase cannot exceed ±2 kV
Output Waveshape Each DC output voltage (Phase A and Phase B)
is ramped up and down with symmetrical rise
and fall times, or can be programmed with the
user’s custom clamping and declamping
waveforms
Output Voltage
Range 0 to ±2 kV DC, maximum
Output Current 0 to ±6.5 mA DC with peak capability of 10 mA
Input
Setting the High-
Voltage Amplitude HV magnitude can be controlled either
externally or internally to the unit
Setting the Offset
Voltage Offset voltage may be controlled externally or
internally to the unit
Output Voltage Monitor (Back Panel Connector)
Scale Factor 1 V/200 V
Phase B DC Accuracy better than 2% of full scale
Offset Voltage Less than 10 mV
Output Noise Less than 50 mV rms*
Steady State Voltage Leakage Current Monitor
Scale Factor 100 µV / 1 µA
DC Accuracy ±5 µA
Output Noise Less than 50 mV rms*
Features
Interlock Connections are provided to support an
interlock safety configuration. In the event that
the interlock is open, the high-voltage
generation circuits are shut down
Digital Display 40X2 LCD character display shows various
system functions such as Set Voltage, Output
Voltage and Capacitance Monitor
*Measured using the true rms feature of the HPModel 34401A digital multimeter
Measurement and Power Solutions TM