Trek 640 Electrostatic Chuck Optimizer - Manual

Trek Model 640
Electrostatic Chuck Optimizer
Key Specifications
! Output Phasing:
Voltage A (Reference Phase)
!
! Output Current Range:
0 to ±2 kV
Voltage B (Phase B = [-1] x Phase A) 0 to ±2 kV
Output Voltage Range: 0 to ±2 kV
0 to ±6.5 mA DC with a peak capability of 10 mA
Typical Applications Include
! Electrostatic-driven handling of materials
! Semiconductor wafer processing
! Non-mechanical transfer of flat panels or other processing materials
sensitive to mechanical clipping
TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK
716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • [email protected]
Features and Benefits
! Enables the creation of customized waveforms to be simple yet powerful, to generate the most complex
waveforms that can be envisioned by the user
! The product’s software accepts parameters via arbitrary data input, pre-programmed waveforms, or company-
specific CSV files
! Utility is enhanced via three individually programmed stages to build the waveform: (1) Clamp Signal Stage, (2)
Processing Signal Stage (with options to “loop” the process cycle), and (3) De-clamp Stage
! Test data is recorded and presented in numerical and graphical format with a color coded display
! The graphs can also be used to troubleshoot mechanical and electrical problems within an ESC operation
! NIST-traceable Certificate of Calibration provided with each unit
! Compliant
Trek’s Model 640 Electrostatic Chuck Optimizer system is a
diagnostic tool which enables evaluation and optimization of
waveforms and voltages for electrostatic chucks/clamps in order to
minimize de-clamp time, maximize clamp force, and achieve
optimum wafer processing for ESC systems.
Model 640 combines two amplifiers (for two-phase voltage
combinations) and a waveform generator, which can be
independently programmed and configured to investigate, research,
and discover the perfect power supply and waveform recipe to
efficiently drive an ESC application. An electrostatic voltmeter
(ESVM) is included to monitor residual voltage from the
clamping/de-clamping process.