Trek 1100TN Electrostatic Force Microscope - Manual

Trek Model 1100TN
Electrostatic Force
Microscope (EFM)
Electrostatic Voltage Distribution
Measurement System
Typical Applications Include
! Measurement of antistatic bags, Si wafer
! Electrophotography material testing
Photovoltaic materials evaluation
MEMS testing
!
!
TREK, INC. • 190 Walnut Street • Lockport, NY 14094 • USA • 800-FOR TREK
716-438-7555 • 716-201-1804 (fax) • www.trekinc.com • [email protected]
Features and Benefits
!
!
! Can be used in atmosphere conditions
Spatial resolution is better than 10 µm
Three measurement modes:
- Static
- Line Profile
- 3D Mapping
Key Specifications
!
!
!
!
!
!
Voltage Range: ±1 kV
Voltage Sensitivity:
Accuracy:
Better than 0.5% of full scale
Better than 100 mV
Incremental Step: 1 µm, minimum (detector)
Detector Tip: 5 µm X 5 µm
Measurement Area: 5 mm X 5 mm
The Trek Model 1100TN Electrostatic Force Microscope (EFM) enables voltage distribution measurements with a very
high spatial resolution – better than 10 µm – which is well beyond the capability of typical electrostatic voltmeters. Trek's
EFM can also measure voltage distribution across a much larger surface area as compared to a scanning probe
microscope when operated under atmospheric conditions. Trek's EFM employs a feedback voltage to the detector which
is equal to the measured voltage thus preventing arcing between the detector and the surface under test.
Measurement Sample of the Antistatic Bag (500 µm X 500 µm)