Trek 640 Electrostatic Chuck Optimizer - Manual (Page 2)

Features
Clamped Wafer
Detection Feature
(Thresholds are set
by the program) To indicate wafer clamping events, the
capacitive currents generated by a low voltage
sine wave, super-imposed on the Phase A and
Phase B outputs, are monitored but can be
disabled through the program. The super-
imposed waveform is used to indicate a no
wafer, wafer present or wafer clamped status
Capacitive Load
Select Clamped capacitance status range can be
selected by the program for 0 to 10, 20 or 30nF
(phase to phase) depending on the system and
electrostatic clamp physical configurations
Mechanical
Dimensions 43.7 mm H x 421.6 mm W x 457.3 mm D
(1.72” H x 16.6” W x 18” D) 1U rack enclosure
Panel Width 482.6 mm (19”)
Weight 8.5 lbs (3.86 kg)
Connectors 15-pin “D” ITT Canon used by remote device to
control/monitor the unit, 9-pin “D” ITT Canon RS-
232, 3-Pin FCT “D” High-Voltage, standard type-A
USB, Ethernet (optional) and Front Panel
Power ON/OFF 2-position rocker switch
Operating Conditions
Temperature 0°C to 35°C (32°F to 104°F)
Relative Humidity To 85%, noncondensing
Altitude To 2000 meters (6561.68 ft.)
Electrical
DC Input Receptacle 2.0 mm locking DC jack; center contact is
positive and shell is negative (receptacle mates
with Switchcraft S761K plug)
Ground Receptacle Ground stud
Power Requirements 24 V DC, 1.7 A
Supplied Accessories
Operator Manual, SW PN: 24010
USB Cable
HV Connectors PN: BA103
PN: B8084R, B8085R, B8088R, B8089R
DC Plug (
S761K) Switchcraft PN: BA119R
Line Cord, Fuses Selected per geographic destination
Optional Accessories
90-264 V AC to
24 V DC Power
Adapter PN: IK045
Note
Trek Model 646, a
Please contact the factory for more information ±3 kV version of this instrument, is also available.
Copyright ã 2012 TREK, INC. All specifications are subject to change. 1237/DEC
Model 640 Specifications
Outputs
Output Phasing
Phase A Output
Voltage Range 0 to ±2 kV DC or peak AC (4 kV p-p)
Phase A Output
Current Range 0 to ±5 mA DC or peak AC (10 mA p-p)
Voltage Range Phase B Output 0 to ±2 kV DC or peak AC (4 kV p-p)
Phase A Output
Current Range 0 to ±5 mA DC or peak AC (10 mA p-p)
Amplifier Performance [each phase]
Large Signal
Bandwidth
(1% distortion) DC to greater than 1.2 kHz
Small Signal
Bandwidth
(-3 dB) DC to greater than 5 kHz
Slew Rate Greater than 15 V/µs
Settling Time less than 300 µs for 0 to 2 kV step
DC Accuracy Better than 0.1% of full scale
Offset Voltage Less than 500 mV
Output Noise Less than 100 mV rms*
Drift with time Less than 100 ppm/hour, noncumulative
Drift with
Temperature Less than 350 ppm/°C
Output Voltage Monitor (Back Panel Connector)
Drift with
Temperature Less than 350 ppm/°C
Steady State Voltage Leakage Current Monitor
Features
*Measured using the true rms feature of the HPModel 34401A digital multimeter
Measurement and Power Solutions TM