Intended use, Function, Trademarks – INFICON SKY CDG025D 0.1 ... 1000 Torr / mbar User Manual
Page 4: Patents
4
tina49e1-c (2009-06)
If not indicated otherwise in the legends, the illustrations in this
document correspond to CDG025D-S gauges with the
DN 16 ISO-KF vacuum connection. They apply to other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended
Use
The Capacitance Diaphragm Gauges of the CDG025 series are
intended for absolute pressure measurement of gases in their
respective pressure ranges (
→ 3).
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electro-
nics which convert the capacitance into a DC voltage output sig-
nal.
The output signal is linear to the measured pressure and inde-
pendent of the gas type.
Trademarks
SKY
®
INFICON
GmbH
VCR
®
Swagelok Marketing Co.
Patents
EP 1070239, 1040333
US Patents 6528008, 6591687, 7107855, 7140085
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