INFICON VSC150A absolute switch, passiv - Manual (Page 3)

Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.1 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Technical Data . . . . . . . . . . . . . . . . . . . . . . 5
1.2.1 VSC150 Vacuum Switch . . . . . . . . . . . . . . . 5
1.2.2 SV Switching Amplifier . . . . . . . . . . . . . . . . 6
1.3 Technical Description . . . . . . . . . . . . . . . . . 6
1.3.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3.2 Vacuum Switch Mode of Operation . . . . . . . 6
1.3.3 Switching Amplifier Mode of Operation . . . . 7
1.4 Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4.1 Scope of Delivery . . . . . . . . . . . . . . . . . . . 8
1.4.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . 8
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.1 Connection to the Vacuum System . . . . . . . 9
2.2 Electrical Connection . . . . . . . . . . . . . . . . 10
2.2.1 Connection of the Vacuum Switch . . . . . . . 11
2.2.2 SV Switching Amplifier . . . . . . . . . . . . . . . 12
2.3 Design Versions and Switch Point Setting . 13
2.3.1 VSC150 Vacuum Switch . . . . . . . . . . . . . . 13
2.3.1.1 Setting Switching Pressures
Higher than 20 mbar . . . . . . . . . . . . . . . . 14
2.3.1.2 Setting Switching Pressures
Lower than 20 mbar . . . . . . . . . . . . . . . . . 14
2.4 Differential Pressure Adapter . . . . . . . . . . . 15
Page
2.4.1 Connecting the Differential Pressure
Adapter to the Vacuum Switch . . . . . . . . . 15
2.4.2 Switching Logic . . . . . . . . . . . . . . . . . . . . . 16
2.5 Typical Applications . . . . . . . . . . . . . . . . . . 16
2.5.1 Protection of a Gate Valve which
must only be Operated when
Pressure on both Sides
Becomes Equal . . . . . . . . . . . . . . . . . . . . 16
2.5.2 In a Vacuum System it must bei
Prevented that in Case of
Failure Gas Flows into the
Vacuum Chamber . . . . . . . . . . . . . . . . . . 17
2.5.3 Automatic Venting of a Vacuum Chamber . 17
2.5.4 Automatic Venting of a Vacuum
Chamber to a Slight Overpressure . . . . . . 18
2.5.5 Differential Pressure Monitoring,
Positive and Negative Going . . . . . . . . . . . 18
3 Maintenance . . . . . . . . . . . . . . . . . . . . . . 19
3.1 Cleaning the Sensing Chamber . . . . . . . . . 19
3.2 Cleaning the Reference Chamber . . . . . . . 20
3.3 Service at INFICON . . . . . . . . . . . . . . . . . 20
4 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . 21
EEC Declaration of Conformity . . . . . . . 22
Declaration of Contamina . . . . . . . . . . . . 23
3
3
tina42e1 (2005-03) VSC150.ga
tina42e1 (2005-03) VSC150.ga
Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.1 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Technical Data . . . . . . . . . . . . . . . . . . . . . . 5
1.2.1 VSC150 Vacuum Switch . . . . . . . . . . . . . . . 5
1.2.2 SV Switching Amplifier . . . . . . . . . . . . . . . . 6
1.3 Technical Description . . . . . . . . . . . . . . . . . 6
1.3.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3.2 Vacuum Switch Mode of Operation . . . . . . . 6
1.3.3 Switching Amplifier Mode of Operation . . . . 7
1.4 Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4.1 Scope of Delivery . . . . . . . . . . . . . . . . . . . 8
1.4.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . 8
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.1 Connection to the Vacuum System . . . . . . . 9
2.2 Electrical Connection . . . . . . . . . . . . . . . . 10
2.2.1 Connection of the Vacuum Switch . . . . . . . 11
2.2.2 SV Switching Amplifier . . . . . . . . . . . . . . . 12
2.3 Design Versions and Switch Point Setting . 13
2.3.1 VSC150 Vacuum Switch . . . . . . . . . . . . . . 13
2.3.1.1 Setting Switching Pressures
Higher than 20 mbar . . . . . . . . . . . . . . . . 14
2.3.1.2 Setting Switching Pressures
Lower than 20 mbar . . . . . . . . . . . . . . . . . 14
2.4 Differential Pressure Adapter . . . . . . . . . . . 15
Page
2.4.1 Connecting the Differential Pressure
Adapter to the Vacuum Switch . . . . . . . . . 15
2.4.2 Switching Logic . . . . . . . . . . . . . . . . . . . . . 16
2.5 Typical Applications . . . . . . . . . . . . . . . . . . 16
2.5.1 Protection of a Gate Valve which
must only be Operated when
Pressure on both Sides
Becomes Equal . . . . . . . . . . . . . . . . . . . . 16
2.5.2 In a Vacuum System it must bei
Prevented that in Case of
Failure Gas Flows into the
Vacuum Chamber . . . . . . . . . . . . . . . . . . 17
2.5.3 Automatic Venting of a Vacuum Chamber . 17
2.5.4 Automatic Venting of a Vacuum
Chamber to a Slight Overpressure . . . . . . 18
2.5.5 Differential Pressure Monitoring,
Positive and Negative Going . . . . . . . . . . . 18
3 Maintenance . . . . . . . . . . . . . . . . . . . . . . 19
3.1 Cleaning the Sensing Chamber . . . . . . . . . 19
3.2 Cleaning the Reference Chamber . . . . . . . 20
3.3 Service at INFICON . . . . . . . . . . . . . . . . . 20
4 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . 21
EEC Declaration of Conformity . . . . . . . 22
Declaration of Contamina . . . . . . . . . . . . 23