INFICON PEG100-P Medium to Ultra-High Vacuum Gauge User Manual
Page 2
General Remarks
We reserve the right to alter the design or any data given
in these Operating Instructions.
The illustrations are not binding.
Contents
Page
1
Description . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1
General . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2
Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.1
Penning Gauge PEG100-P . . . . . . . . . . . . . 3
1.2.2
Profibus DP . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.3
Profibus-DP Master Configuration Software . 3
1.3
Technical Description . . . . . . . . . . . . . . . . . 4
1.3.1
Configuration of Fieldbus nodes in
Profibus-DP . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3.1.1 GSD File / Main Equipment File . . . . . . . . . 4
1.4
Technical Data . . . . . . . . . . . . . . . . . . . . . . 4
1.5
Supplied Equipment . . . . . . . . . . . . . . . . . . 4
2
Operation . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1
Operation of PEG100-P . . . . . . . . . . . . . . . 5
2.1.1
Setting Slave’s Address . . . . . . . . . . . . . . . 5
2.2
Input and Output Data . . . . . . . . . . . . . . . . 5
2.2.1
Meaning of PEG100-P (slave) input
and output data . . . . . . . . . . . . . . . . . . . . . 6
2.2.1.1 PEG100-P output data (output data
from the master’s view point) . . . . . . . . . . . 6
2.2.1.2 PEG100-P input data
(from master’s view point) . . . . . . . . . . . . . . 6
2.3
Data of diagnosis . . . . . . . . . . . . . . . . . . . . 7
3
Service at INFICON . . . . . . . . . . . . . . . . . . 7
4
Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . 7
EEC Declaration of Conformity . . . . . . . . . . . . . . . 8
Declaration of Contamination . . . . . . . . . . . . . . . . 9
2
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