INFICON Edge CDG045D2 1 … 1000Torr / mbar - Manual (Page 4)

4 tina86e1 (2013-11)
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDG045D2 and CDG100D2 series are intended for
absolute pressure measurement of gases in their respective
pressure ranges (
→  3).
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate controller.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45 °C or 100°C which
results in a compensation of changes in the ambient conditions
and a reduced deposition of process products and by-products in
process applications. An integrated baffle protects the sensor
against coating.
Trademarks
SKY
®
INFICON GmbH
VCR
®
Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085