3cx5-xxx-23xx, Validity – INFICON Edge CDG045D2 1 … 1000Torr / mbar User Manual
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tina86e1 (2013-11)
3
Validity
This document applies to products of the Edge CDG045D2 and
Edge CDG100D2 series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
3Cx5-xxx-23xx
0
None (analog)
8
EtherCAT
Filter
0
Standard
B
P control
Interface
Flange
6
1
7
2
8
5
9
10
A
20
B
50
C 100
D
200
E
500
F
1000 (Torr only)
G
1100 (mbar only)
5
Torr
(x 133 Pa; x 1.3 mbar)
6
mbar
(x 100 Pa)
Measurement range
(F.S.)
Unit
1
DN 16 ISO-KF
3
DN 16 CF-R
9
1/2" tube
E
8VCR female
Sensor temperature
C 45 °C
D
100 °C
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.