INFICON PSG55x ATM to Medium Vacuum Gauge - Manual (Page 10)

10 tina60e1-a (2011-04)
2 Technical Data
For further technical data for gauges with serial inter-
faces → [3], [4], [5].
Measurement principle thermal conductance acc. to
Pirani
Measurement range 5×10
-5
… 1000 mbar
Accuracy (N
2
)
5Ч10 -4 … 1Ч10 -3 mbar
±50% of
reading
1×10
-3
… 100 mbar ±15% of reading
100 … 1000 mbar ±50% of reading
Resolution (at 1000 mbar) ±0.15% of reading
Repeatability (N
2
)
1×10 -3 … 100 mbar
±2% of
reading
Output signal (measurement signal)
Voltage range
3PIx-0xx-xxx0
0 … +10 V
3PIx-0xx-xxx1 0 … +8.5 V
3PIx-0xx-xxx2 0 … +5.529 V
3PIx-0xx-xxx3 0 … +8.875 V
Measurement range
3PIx-0xx-xxx0
+0.61 … +10 V
3PIx-0xx-xxx1 +1.2 … +8.5 V
3PIx-0xx-xxx2 +0.375 … +5.529 V
3PIx-0xx-xxx3 +1.57 … +8.875 V
Error signal 0 … 0.05 V
Voltage vs. pressure
3PIx-0xx-xxx0
1.286 V/decade, logarithmic
3PIx-0xx-xxx1 1 V/decade, logarithmic
3PIx-0xx-xxx3 1 V/decade, logarithmic
3PIx-0xx-xxx2 → 20