INFICON Cool Drawer Single Sensor - Manual (Page 11)

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Cool Drawer Single and Dual Sensors Operating Manual
Chapter 1
Introduction
1.1 Introduction
INFICON Cool Drawer TM sensors, see Figure 1-1 , offer proven reliability and
durability combined with excellent thermal stability. The Cool Drawer design allows
crystal installation into the sensor from the side, convenient for systems with
insufficient room for front load crystal installation. Sensors can be ordered in a
sensor and feedthrough combination that can be either welded or assembled with
O-ring compression fittings.
Figure 1-1 Cool Drawer sensors
The Cool Drawer sensor comes in two styles: Single or Dual. Each style is available
in both Standard and Right Angle orientation.

Standard orientation: Cooling tubes are aligned parallel to the crystal face.
Typically installed from the side or bottom of the chamber.
 Right Angle orientation: Cooling tubes are aligned perpendicular to the crystal
face. Typically installed from the top of the chamber.
Sensors can be ordered with a pneumatically driven crystal shutter to protect the
crystal during source warm up, or when the sensor is not used during deposition of
an alternate material, or to extend crystal life when used with sampling.
NOTE: A crystal shutter is standard on dual sensors.