Brooks Instrument 5861E - Manual (Page 6)

ii
Contents Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008 Model 5861E
Figures
Figure Page
Number Number
2-1 Model 5861E Dimensions ........................................................................................................... 2-3
2-2 "D" Type Connector Pin Arrangement ......................................................................................... 2-3
3-1 Flow Sensor Operational Diagram .............................................................................................. 3-2
3-2 Model 5861E Calibration Connections ........................................................................................ 3-4
3-3 Adjustment Potentiometer Location ............................................................................................ 3-4
3-4 Fast Response Adjustment ......................................................................................................... 3-4
4-1 Restrictor Element Assembly ..................................................................................................... 4-10
4-2 Restrictor Orientation in Meter Body .......................................................................................... 4-10
5-1 Model 5861E Parts Drawing ....................................................................................................... 5-2
Tables
Table Page
Number Number
2-1 Recommended Filter Size .......................................................................................................... 2-4
4-1 Bench Troubleshooting ............................................................................................................... 4-2
4-2 Sensor Troubleshooting .............................................................................................................. 4-2
4-3 Conversion Factors (Nitrogen Base) .......................................................................................... 4-7
4-4 Restrictor Selection Guide ......................................................................................................... 4-11
5-1 Model 5861E Replacement Parts List ......................................................................................... 5-3
5-2 Tool and Spare Part Kits for 5861E ............................................................................................. 5-4