Brooks Instrument 5861E - Manual (Page 5)

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Contents Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008
Model 5861E
Paragraph Page
Number Number
Section 1 Introduction
1-1 Purpose ...................................................................................................................................... 1-1
1-2 Description ................................................................................................................................. 1-1
1-3 Specifications ............................................................................................................................. 1-1
Section 2 Installation
2-1 Receipt of Equipment ................................................................................................................. 2-1
2-2 Recommended Storage Practice ................................................................................................ 2-1
2-3 Return Shipment ........................................................................................................................ 2-2
2-4 Gas Connections ........................................................................................................................ 2-2
2-5 Installation .................................................................................................................................. 2-2
2-6 In-Line Filter ............................................................................................................................... 2-4
2-7 Electrical Interfacing ................................................................................................................... 2-5
Section 3 Operation
3-1 Theory of Operation .................................................................................................................... 3-1
3-2 Operating Procedure .................................................................................................................. 3-2
3-3 Zero Adjustment ......................................................................................................................... 3-2
3-4 Calibration Procedure ................................................................................................................. 3-3
3-5 Response (Flow Output Signal) .................................................................................................. 3-6
Section 4 Maintenance
4-1 General ...................................................................................................................................... 4-1
4-2 Troubleshooting .......................................................................................................................... 4-1
4-3 Sensor Tube ............................................................................................................................... 4-4
4-4 Disassembly and Assembly ........................................................................................................ 4-4
4-5 Use of the Conversion Tables ..................................................................................................... 4-6
4-6 Restrictor Sizing ......................................................................................................................... 4-9
Section 4 Parts List
5-1 General ...................................................................................................................................... 5-1
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................. A-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover