Brooks Instrument 5861E - Manual (Page 21)

4-1
Model 5861E
Section 4 Maintenance Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008
4-1 General
No routine maintenance is required on the Model 5861E other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.
2. Connect the instrument to a source of the same gas used for it's
original calibration. Regulate the Setpoint to 100% flow and adjust the
inlet and outlet pressures to calibration conditions. Verify that the output
signal reaches its full scale value and stabilizes at that value. Vary the
command voltage over the 1 to 100% range and verify that the output
signal follows the Setpoint If possible, connect a flow measurement
device to monitor the actual flow behavior and verify the accuracy of the
mass flow instrument. If the mass instrument performs as described
above, then it is functioning correctly and the problem may lie
elsewhere.
4-1 Troubleshooting