Brooks Instrument SLA5810/20 - Manual (Page 17)

2-3
Section 2 Installation
Models SLA5810 and SLA5820
Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
pressure controller to prevent the possibility of any foreign material entering
the sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
2-9 Installation
Recommended installation procedures:
a.The Digital PC should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b.Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d.The Digital PC can be installed in any position.
Maximum Flow Rate Recommended Filter
100 sccm 2 micron
500 sccm 2 micron
1 to 5 slpm 10 micron
10 to 30 slpm 40 micron
10 to 30 slpm 40 micron
30 slpm to 100 slpm 40 micron
> 100 slpm Consult Factory