Brooks Instrument SLA5810/20 - Manual (Page 11)

1-5
Models SLA5810 and SLA5820
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
Model SLA5820
Upstream Application
Flow Determined by a Mass
Flow Controller on the inlet
of the vessel
Model SLA5810
Downstream Application
Flow Determined by
Characteristics of
Vacuum Pump
Figure 1-2 Typical Configurations
Figure 1-1 D-Connector Electrical Pin Connections
Analog I/O Pin Connections:
PIN # FUNCTION
1 Setpoint Command Input (-)
2 Signal, 0(1)-5 volt, Output (+)
3 Not Connected
4
5
Power Supply, +15 Vdc or +24 Vdc (+)
6
7
8
9
Power Supply, Common (-)
10 Signal, Common, Output, (-)
11 Reference, +5 Vdc, Output, (+)
12 Valve Override, Input
13 Calibration Select, Input
14 Chassis Ground
15 External Sensor, Input
Signal, 0(4)-20 mA, Output (+)
Not Connected
Setpoint, 0(4)-20 mA, Input (+)
Setpoint, 0(1)-5 volt, Input (+)