Atec Keithley_2657A - Manual (Page 3)

Model 2657a rear panel Model 8010 High Power Device Test fixture S
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(U.S. only)
A Greater Measure of Confidence
2657a High Power System SourceMeter
SMU Instrument
standard Capabilities of series
2600b sMu instruments
Each Model 2657A includes all the features
and capabilities provided in Series 2600B
SourceMeter SMU instruments:
• Flexibility for use as either a bench-top
I-V characterization tool or as a building
block component of multiple channel I-V
test systems .
• TSP Express software to perform common I-V
tests quickly and easily without programming
or installing software .
• ACS Basic Edition software for semiconductor
component characterization (optional) . ACS
Basic Edition now features a “Trace” mode for
generating a suite of characteristic curves .
• Keithley’s Test Script Processor (TSP)
technology supports creating and running
custom user test scripts for high speed test
automation, as well as creating programming
sequences that allow the instrument to
operate asynchronously without direct
PC control .
• Parallel test execution and precision timing
when multiple Series 2600B SMU instruments
are connected together in a system .
• LXI Class C compliance .
• 14 digital I/O lines for direct connection to a
probe station, component handler, or other
automation tools .
• USB port for extra data and test program
storage via USB memory device .
Model 2657a Condensed specifications
VolTaGE aCCuraCY sPECIfICaTIoNs 1
sourCE MEasurE
range
Programming
resolution
accuracy
±(% rdg + volts)
Display
resolution
Integrating aDC
accuracy 2
±(% rdg + volts)
High speed
aDC accuracy 3
±(% rdg + volts)
200 V 5 mV 0 .03% + 50 mV 100 µV 0 .025% + 50 mV 0 .05% + 100 mV
500 V 10 mV 0 .03% + 125 mV 100 µV 0 .025% + 100 mV 0 .05% + 200 mV
1500 V 40 mV 0 .03% + 375 mV 1 mV 0 .025% + 300 mV 0 .05% + 600 mV
3000 V 80 mV 0 .03% + 750 mV 1 mV 0 .025% + 600 mV 0 .05% + 1 .2 V
CurrENT aCCuraCY sPECIfICaTIoNs 4
sourCE MEasurE
range
Programming
resolution
accuracy
±(% rdg + amps)
Display
resolution
Integrating aDC
accuracy 2
±(% rdg + amps)
High speed
aDC accuracy 3
±(% rdg + amps)
1 nA 30 fA 0 .1% + 2E –12 + VoE –15 1 fA 0 .1% + 6E –13 + VoE –15 0 .2% + 6E –13 + VoE –15
10 nA 300 fA 0 .1% + 5E –12 + VoE –15 10 fA 0 .1% + 5E –12 + VoE –15 0 .2% + 5E –12 + VoE –15
100 nA 3 pA 0 .1% + 6E –11 + VoE –13 100 fA 0 .1% + 6E –11 + VoE –13 0 .2% + 6E –11 + VoE –13
1 µA 30 pA 0 .03% + 700 pA 1 pA 0 .025% + 400 pA 0 .08% + 800 nA
10 µA 300 pA 0 .03% + 5 nA 10 pA 0 .025% + 1 .5 nA 0 .08% + 3 nA
100 µA 3 nA 0 .03% + 60 nA 100 pA 0 .02 % + 25 nA 0 .05% + 50 nA
1 mA 30 nA 0 .03% + 300 nA 1 nA 0 .02 % + 200 nA 0 .05% + 400 nA
2 mA 60 nA 0 .03% + 1 .2 µA 1 nA 0 .02 % + 500 nA 0 .05% + 1 µA
20 mA 600 nA 0 .03% + 12 µA 10 nA 0 .02 % + 5 µA 0 .05% + 10 µA
120 mA 3 µA 0 .03% + 36 µA 100 nA 0 .02 % + 24 µA 0 .05% + 50 µA
1 . For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0 .15 × accuracy specification)/°C .
2 . Derate accuracy specification for NPLC setting <1 by increasing error term . Add appropriate typical percent of range term for resistive loads using the
table below .
NPlC
setting
200 V and 500 V
ranges
1500 V and 3000 V
ranges 100 na range
1 µa to 120 ma
ranges
0 .1 0 .01% 0 .01% 0 .01% 0 .01%
0 .01 0 .08% 0 .07% 0 .1 % 0 .05%
0 .001 0 .8 % 0 .6 % 1 % 0 .5 %
3 . 18-bit ADC . Average of 1000 samples taken at 1µs intervals .
4 . For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0 .35 × accuracy specification)/°C .
suPPlEMENTal CHaraCTErIsTICs
TyPICAL VOLTAGE SOURCE NOISE: 0 .005% of range .
TyPICAL CURRENT SOURCE NOISE: 0 .08% of range .
TyPICAL VOLTAGE SOURCE SETTLING: <1ms to 200V, <7ms to 3000V .
TyPICAL CURRENT SOURCE SETTLING: <5ms to 120mA, <200ms to 1µA .
Specifications are subject to change without notice .
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