Olicom 9600 - Manual (Page 38)

9600 Compressor Installation, Operation, and Maintenance
P/N 8040540 3-15
C
HELIX TECHNOLOGY CORPORATION
- TI CRYOGENICS
NOTE: The Cryo-Torr Interface can be installed at the process tool
containing the cryopumps as shown in Figure 3-8 or near the Compressor
as shown in Figure 3-9. CTI-CRYOGENICS recommends that the Cryo-
Torr Interface be installed at the process tool to reduce cable requirements.
Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation
CRYOPUMP POWER CABLE
USER REMOTE
(FROM VACUUM SYSTEM)
HELIUM SUPPLY
HELIUM RETURN
WATER POWER
CRYO-TORR
INTERFACE
REMOTE