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Power cable connections, Helium supply, Power cable connections -12 – Olicom 9600 User Manual

Page 35: Ti cryogenics

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Installation

3-12

P/N 8040540

C

HELIX TECHNOLOGY CORPORATION

-

TI

CRYOGENICS

Power Cable Connections

1. Connect the On-Board Splitter Box power cable between the

CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor and the On-Board Splitter Box power connector as
shown in Figure 3-6.

2. Connect the On-Board Cryopump or Waterpump power cables to

the CRYOPUMP 1, 2, or 3 connectors on the On-Board Splitter
Box and the respective cryopumps as shown in Figure 3-6.

NOTE: Your installation (number of pumps per compressor) will vary
based upon the On-Board Cryopump models used. Refer to Appendix A to
consult your local CTI-CRYOGENICS Customer Support Center for
information on specific compressor/pump applications.

NOTE: The On-Board Splitter Box can be installed at the process tool
containing the pumps as shown in Figure 3-6, or on the rear of the
Compressor as shown in Figure 3-7. CTI-CRYOGENICS recommends that
the On-Board Splitter box be installed near the process tool to reduce cable
requirements.

Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation

(Splitter Box located at Process Tool)

HELIUM SUPPLY

HELIUM RETURN

WATER

POWER

ON-BOARD POWER CABLE

REMOTE

ON-BOARD SPLITTER

BOX